Features for Clean Rooms Air-conditioning

Features for Clean Rooms Air-conditioning clean rooms I.Temperature and humidity requirements are higher than general air-con. The temperature requirement for general air-con is between 18°C and 26°C and the relative humidity is between 40% and 65%; while the temperature in Clean Room should be controlled between 22°C and 24°C and the humidity in it should be between 45% and 55%.   II.Constant temperature and humidity control It is extremely temperature-sensitive for the semiconductor industry; therefore, the temperature and humidity should be controlled within ± 1°C [...]

Worldwide Standard Cleanliness

Worldwide Standard Cleanliness Cleanliness The cleanroom classification standards FS 209E and ISO 14644-1 require specific particle count measurements and calculations to classify the cleanliness level of a cleanroom or clean area. ISO 14644-1 Maximum concentration limits (particles/m3 ) Classification Number (N) 0.1μm 0.2μm 0.3μm 0.5μm 1.0μm 5.0μm ISO Class 1 10 2 – – – – ISO Class 2 100 24 10 4 – – ISO Class 3 1,000 237 102 35.2 8 – ISO Class 4 10,000 2,370 1,020 352 83 – ISO Class 5 100,000 23,700 10,200 3,520 832 29 ISO Class 6 1,000,000 237,000 102,000 35,200 83,200 293 ISO Class 7 – – – 352,000 832,000 2,930 ISO Class 8 – – – 35,200,000 8,320,000 29,300 ISO Class 9 – – – – – 293,000 Federal Standard 209E Airborne Particulate Cleanliness Classes Diameter for Airborne Particle ICR Cleanliness 0.1μm 0.2μm 0.3μm 0.5μm 0.5μm Volume Units Volume Units Volume Units Volume Units Volume Units SI Class (m3) (ft3) (m3) (ft3) (m3) (ft3) (m3) (ft3) (m3) (ft3) M1 350 9.91 75.7 2.14 30.9 0.875 10.0 0.283 – – M1.5 1 1240 35.0 265 7.50 106 3.00 35.3 1.00 – – M2 3,500 99.1 757 21.4 309 8.75 100 2.83 – – M2.5 10 12,400 350 2,650 75.0 1,060 30.0 353 10.0 – – M3 35,000 991 7,570 214 3,090 87.5 1,000 28.3 – – M3.5 100 – – 26,500 750 10.600 300 3,530 100 – – M4 – – 75,700 2,140 30,900 875 10,000 283 – – M4.5 1000 – – – – – – 35,300 1,000 247 7.00 M5 – – – – – – 100,000 2,830 618 17.5 M5.5 10,000 – – – – – – 353,000 10,000 2,470 70.0 M6 – – – – – – 1,000,000 28,300 6,180 175 M6.5 100,000 – – – – – – 3,530,000 100,00 24,700 700 M7 – – – – – – 10,000,000 283,000 61,800 1,750 JIS B 9920 Class Maximum concentration limits (particles/m3 ) 0.1μm 0.2μm 0.3μm 0.5μm 1μm 05μm Class1 10 2 — — — — Class2 100 24 10 4 — — Class3 100 237 102 35 8 — Class4 10,000 2,370 1,020 352 83 — Class5 100,000 23,700 10,200 3,520 832 29 Class6 — 237,000 102,000 35,200 8,320 293 Class7 — — — 352,000 83,200 2,930 Class8 — — — 3,520,000 832,000 29,300 Class9 — — — 35,200,000 8,320,000 293,000 Britain BS 5295 Classs Maximum concentration limits (particles/m3 ) 0.5μm 1μm 5μm 10μm 25μm Class 1 3,000 — 0 0 0 Class [...]

Filter Integrity Test

Filter Integrity Test PAO Method (For testing HEPA) In the PAO test, a gas type of smoke will be generated by the PAO generator. After using the photometer to test the concentration on the upstream of the HEPA, a particle counter will be put at the air exhaust area to test the PAO concentration that passes through HEPA. The distance between the particle counter and HEPA will be around 25mm with testing speed at 50mm/sec. The test range includes HEPA filter [...]

Cleanrooms Operate

Cleanrooms Operate Cleanrooms are designated areas that are free from contaminants and airborne particles. These designated areas are generally used either for manufacturing or research processes. However, compared to most manufacturing processes, cleanrooms are strictly safer and free from many types of airborne particles. In the absence of cleanroom and cleanroom air showers, the density of airborne particles inside a room can vary due to various reasons and disturb the manufacturing or research process. Here are some of the causes that [...]

Note When Getting Cleanrooms

Note When Getting Cleanrooms Basically, there are various types of particles around us and a considerable amount of these particles are harmful to some manufacturing processes. Some everyday microorganisms too can be harmful to sensitive manufacturing processes. Since most of the industries consider manufacturing micro devices these days, contamination can become a serious threat to such processes. If you are involved in a manufacturing process that demands cleanrooms, you should go for it without compromising. Should you go for a traditional [...]

Airflow Control of Cleanrooms

Airflow Control of Cleanrooms Many professionals around the globe make the best use of cleanrooms in order to standardize their production and research processes. At a glance, the outer appearance of cleanrooms may look normal and similar to the conventional rooms that have glass walls, doors, and windows. However, in the context of functionality, cleanrooms are quite different from the other rooms. The most significant characteristic associated with cleanrooms is the strict airflow control. HVAC Unit When it comes to a standard [...]

Characteristics of Air Showers

Characteristics of Air Showers Air showers is one of  the most important equipment of clean room. Installation of cleanrooms is a highly beneficial step for a manufacturing plant or a research facility that expects the supreme level of cleanliness and contamination-free, controlled environment. However, without cleanroom air showers, you cannot expect the best efficiency out of your cleanroom setup. This article explains the characteristics of a good cleanroom air shower that assures perfect cleanliness. Air flow The most important characteristic of a [...]

Introduction Of Clean Room Terminology

Introduction Of Clean Room Terminology What is a Clean room? Clean room is a enclosed area that’s controlled environmentally over atmospheric contamination, temperature, pressure and, often, humidity. What is a Clean room Air Lock: A room attached to the Cleanroom. This room has interlocking doors and its function is to act as a buffer zone between the cleanroom and the outside atmosphere, during the transfer of material or personnel. It helps keep the cleanroom pressurized and free from infiltrating dirt. What is a Cleanroom [...]

Why do we need a cleanroom?

Why do we need a cleanroom? The Cleanroom The purpose of every cleanroom is to control an environment by limiting the presence of sub-micron particles and modifying inadequate environmental conditions. The level to which the environment is controlled is what separates one cleanroom from another. For instance, a Class 10 cleanroom has 10 particles of size 0.5 microns per cubic foot of air, where as a Class 100,000 clean room has 100,000 particles of size 0.5 micron per cubic foot of [...]

Air Filter’s Air Flow Rates In Different Cleanliness

Air Filter’s Air Flow Rates In Different Cleanliness For detailed information on Air Flow Rates, contact a HAOAIR specialists to get specific answers to your project. Class per ISO 14644 (Old FS 209 e) Average Airflow (Across Entire Room) Air Changes (per hour) ISO 8 (Class 100,000) 0.005 – 0.041 m/sec (1 – 8 ft/min) 5 – 48 ISO 7 (Class 10,000) 0.051 – 0.076 m/sec (10 – 15 ft/min) 60 – 90 ISO 6 (Class 1,000) 0.127 – 0.203 m/sec (25 – 40 ft/min) 150 – 240 ISO 5 (Class 100) 0.203 – 0.406 m/sec (40 – 80 ft/min) 240 – 480 ISO 4 [...]

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